2" to 8" Inch process(Can used to 12" after replacing susceptor), Used for R&D pHEMTs, 1x Main Process Chamber(6x Bath, 4x AMETEK Sorensen Power supply: 1x Inner, 1x Middle Master, 1x Middle Slave, 1x Outer Master, Robot: Genmark), 3x Insitu Sensor(2x RT & 1x DRT), 4x Pump(A&N) Sub modue(1x TCU_330 DA, 2x Dry pump_Ebara ESA 70W)